====章節目錄====
Chapter 1 Introduction
Section 1 Goal of Research
Section 2 Methods of Research
Section 3 Structure of Research
Chapter 2 Low Dielectric Constant Material
Section 1 Foreword
Section 2 Patent Map Analysis
Section 3 Scientific Literatures Analysis
Section 4 Research Projects Analysis
Section 5 Status of Leading Companies
Section 6 Technical Assessment
Chapter 3 Silicon on Insulator (SOI)
Section 1 Foreword
Section 2 Patent Map Analysis
Section 3 Scientific Literatures Analysis
Section 4 Research Projects Analysis
Section 5 Status of Leading Companies
Section 6 Technical Assessment
Chapter 4 Magnetic Random Access Memory (MRAM)
Section 1 Foreword
Section 2 Patent Map Analysis
Section 3 Scientific Literatures Analysis
Section 4 Research Projects Analysis
Section 5 Status of Leading Companies
Section 6 Technical Assessment
Chapter 5 Atomic Layer Deposition (ALD)
Section 1 Foreword
Section 2 Patent Map Analysis
Section 3 Scientific Literatures Analysis
Section 4 Research Projects Analysis
Section 5 Status of Leading Companies
Section 6 Technical Assessment
Chapter 6 EUV Lithography
Section 1 Foreword
Section 2 Patent Map Analysis
Section 3 Scientific Literatures Analysis
Section 4 Research Projects Analysis
Section 5 Status of Leading Companies
Section 6 Technical Assessment
Chapter 7 Conclusion
Section 1 Patent Map Analysis
Section 2 Scientific Literatures Analysis
Section 3 Research Projects Analysis
====表目錄====
Table 2-1 Technology Development Road Map of Low Dielectric Constant Material of ITRS
Table 3-1 Silicon wafer market price in 2003
Table 4-1 Characteristics comparison between MRAM and mainstream memory
Table 5-1 Market size and forecast of global thin film deposition equipment market.
Table 6-1 ITRS Lithography Roadmap
Table 6-2 Photolithography Technology Roadmap corrected by Intel
====圖目錄====
Figure 1-1 Structure of research
Figure 2-1 Historical patent numbers of low dielectric material
Figure 2-2 Number of Patents of low dielectric constant material published in the history
Figure 3-1 Historical number of SOI Patents
Figure 3-2 Number of Published Historical SOI Patents
Figure 3-3 Demand forecast of SOI wafers
Figure 4-1 Historical number of patents of MRAM
Figure 4-2 Number of Patents of MRAM published in the history
Figure 5-1 Global market distribution of semiconductor equipment
Figure 5-2 Historical number of patents of ALD
Figure 5-3 Number of Patents of ALD published in history
Figure 6-1 Historical number of EUV patents
Figure 6-2 Historical number of patents of EUV
Figure 6-3 shows the development schedule of LLC
Figure 6-4 EUVA development schedule
Figure 6-5 Illustration of reflective EUV optical system
Figure 6-6 Structure of EUV mask
Figure 7-1 Bubble diagram of number of patents for Nanoelectronics technology
Figure 7-2 Bubble diagram of Nanoelectronics technology for scientific literatures
Figure 7-3 Relationship between the number of research projects and amount of money invested into the Nanoelectronic technology by Taiwanese government.